| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030753 | Surface and Coatings Technology | 2012 | 4 Pages |
Abstract
⺠Sputtered ATO film properties are determined by the oxygen partial pressure during preparation. ⺠Low oxygen content in the sputter gas results in a (101) preferential orientation. ⺠High oxygen content in the sputter gas results in a (110) preferential orientation. ⺠Oxygen vacancies in the lattice reduce the optical transmittance and refractive index. ⺠Annealing processes enhance the ATO film conductivity.
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Physical Sciences and Engineering
Materials Science
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Authors
J. Montero, C. Guillén, J. Herrero,