| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8030782 | Surface and Coatings Technology | 2012 | 4 Pages |
Abstract
⺠Nitrogen-doped DLC was deposited by the anode layer source. ⺠Hydrogen content is 18-24 at.% and only slightly varies with deposition parameters. ⺠Structurally, increasing the N2 flow or the discharge voltage has a similar effect. ⺠Both cause an increasing structural ordering and a decreasing CC sp3 content.
Related Topics
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Authors
M. Äekada, M. Kahn, P. Pelicon, Z. SiketiÄ, I. BogdanoviÄ RadoviÄ, W. Waldhauser, S. Paskvale,