Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8030787 | Surface and Coatings Technology | 2012 | 5 Pages |
Abstract
⺠ALD mono/bi/multilayers of Al2O3 and TiO2 were successfully deposited on 316 Stainless Steel. ⺠GDOES results gave information about composition and thickness of the different ALD layers. ⺠Corrosion resistance was strongly enhanced by ALD application. ⺠Multilayer ALD configurations proved to be more protective compared to single layers.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
E. Marin, A. Lanzutti, M. Lekka, L. Guzman, W. Ensinger, L. Fedrizzi,