Article ID Journal Published Year Pages File Type
8030829 Surface and Coatings Technology 2012 5 Pages PDF
Abstract
► We derived a mathematical model for film bulk acoustic resonator with acoustic Bragg resonator in order to analyze the resonance characteristics. ► We verified the derived mathematical model by experiment of PZT element with Bragg reflectors. ► We considered the ZnO based film bulk acoustic resonator with various acoustic Bragg reflectors. ► We analyzed various parameters affecting the performance of film bulk acoustic resonator with Bragg reflector by using the derived model.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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