Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8030829 | Surface and Coatings Technology | 2012 | 5 Pages |
Abstract
⺠We derived a mathematical model for film bulk acoustic resonator with acoustic Bragg resonator in order to analyze the resonance characteristics. ⺠We verified the derived mathematical model by experiment of PZT element with Bragg reflectors. ⺠We considered the ZnO based film bulk acoustic resonator with various acoustic Bragg reflectors. ⺠We analyzed various parameters affecting the performance of film bulk acoustic resonator with Bragg reflector by using the derived model.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Hee-Young Kim, Ki-Bok Kim, Seung Hyun Cho, Yong-Il Kim,