| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8031097 | Surface and Coatings Technology | 2012 | 7 Pages |
Abstract
⺠We prepare Si coatings on SiC ceramics by advanced plasma source ion plating. ⺠We examine surface morphology and properties varying deposition parameters. ⺠Slowing down deposition rate will lead to smooth surface without notches. ⺠Rising substrate temperature will significantly improve optical reflectance. ⺠We reveal contributions of residual stress and substrate temperature to reflectance.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
G.L. Liu, Z.R. Huang, J.H. Wu, X.J. Liu,