| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8031141 | Surface and Coatings Technology | 2012 | 5 Pages |
Abstract
⺠The surface acoustic wave method is promoted to study the film adhesion property. ⺠The spring boundary model is used in SAW to inspect the interfacial property. ⺠Two low-k samples are tested to verify the feasibility of the proposed method. ⺠The adhesion qualities resulted from the promoted SAW and scratch have same trend. ⺠This method is accurate, quantitative and nondestructive for the adhesion test.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
X. Xiao, Y. Sun, X.-M. Shan,