| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8031193 | Surface and Coatings Technology | 2012 | 7 Pages |
Abstract
⺠The substrate bias influences the structure and properties of (TiVCrZrHf)N coatings. ⺠Surface, structure and mechanical properties of (TiVCrZrHf)N coatings were improved. ⺠A continuous change in structure, from amorphous to columns with FCC phase was present. ⺠The hardness of the coatings deposited at 100 V or higher was around 32-33 GPa.
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Authors
Du-Cheng Tsai, Shih-Chang Liang, Zue-Chin Chang, Tai-Nan Lin, Ming-Hua Shiao, Fuh-Sheng Shieu,