| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8031251 | Surface and Coatings Technology | 2012 | 6 Pages |
Abstract
⺠Addition of Al in ZrO2 film. ⺠Structure, microstructure, elemental and phase composition. ⺠Mechanical and optical properties of Al-Zr-O films. ⺠Hard films with low effective Young's modulus Eâ. ⺠Enhanced resistance of Al-Zr-O films to cracking.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
J. Musil, J. Sklenka, R. Äerstvý, T. Suzuki, T. Mori, M. Takahashi,