| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8031389 | Surface and Coatings Technology | 2012 | 9 Pages |
Abstract
⺠Hybrid system combining dual-HiPIMS and MF discharges was developed. ⺠Combination of HiPIMS and MF discharges allows significant reduction of pressure. ⺠MF discharges causes pre-ionization effect which supports HiPIMS re-ignition. ⺠High ion energy (~ 15 eV) and efficient ionization of sputtered atoms were observed. ⺠Energy of incoming particles influences growth of multilayer-structured Ti-Cu film.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Vitezslav Stranak, Steffen Drache, Robert Bogdanowicz, Harm Wulff, Ann-Pierra Herrendorf, Zdenek Hubicka, Martin Cada, Milan Tichy, Rainer Hippler,