Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8031420 | Surface and Coatings Technology | 2012 | 6 Pages |
Abstract
⺠Synthesis of composite structure (TaC and graphite) by hot-filament CVD technique. ⺠Under selective process parameters, film properties are greatly varied. ⺠The higher the graphite content, the lower the hardness of the deposited film.
Related Topics
Physical Sciences and Engineering
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Authors
M. Ali, M. Ãrgen, M.A. Atta,