Article ID Journal Published Year Pages File Type
8031571 Surface and Coatings Technology 2012 6 Pages PDF
Abstract
► The main reason for erosion of the electrode is the thermal effect. ► The electric field around the coaxial electrode is enhanced by the presence of the Teflon opened tube. ► The developed electrode enables a smooth deposition without metal contamination.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Improvement in preventing metal contamination from an electrode used for generating microwave plasma in liquid
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