| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8031642 | Surface and Coatings Technology | 2012 | 7 Pages |
Abstract
⺠We successfully prepared the newly designed TaN/a-CNx multilayers ⺠Thickness of CNx layer is quite important for mechanical properties ⺠TaN/a-CNx multilayer with 1-2 nm-thick CNx possesses the best properties
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
R. Chen, J.P. Tu, D.G. Liu, Y.L. Yu, S.X. Qu, C.D. Gu,