| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8031716 | Surface and Coatings Technology | 2011 | 6 Pages |
Abstract
⺠Mixed siloxane and silazane precursor (MSSP) based DLN films are produced by rf-PECVD. ⺠The structural and tribological properties of these films are discussed. ⺠Surface roughness, friction coefficient, elastic modulus, hardness, etc. are modified. ⺠Varying combinations of precursors, we can control the film properties.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
T.S. Santra, T.K. Bhattacharyya, P. Patel, F.G. Tseng, T.K. Barik,