| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8031815 | Surface and Coatings Technology | 2012 | 5 Pages |
Abstract
⺠Young modulus and Poisson ratio of TiO2 thin films prepared by ALD are measured. ⺠XRD measurements are performed at Synchrotron applying different tensile stress loads. ⺠Experimental values are in very good agreement with theoretical predicted ones.
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Authors
L. Borgese, M. Gelfi, E. Bontempi, P. Goudeau, G. Geandier, D. Thiaudière, L.E. Depero,