| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8031908 | Surface and Coatings Technology | 2012 | 4 Pages |
Abstract
⺠We synthesized transparent and hard SiOC(âH) films from a mixture of TrMS and O2. ⺠Hardness and transparency can be controlled by changing the mixture ratio. ⺠Transparency deteriorated and hardness increased as TrMS mix ratio increased. ⺠Increasing TrMS mix ratio led to increase in Si-CH3 and decrease in caged SiâOâSi. ⺠We obtained SiOC(âH) films as hard as 6.5 GPa with a transparency of ~ 100%.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Mayui Noborisaka, Hideyuki Kodama, So Nagashima, Akira Shirakura, Takahiro Horiuchi, Tetsuya Suzuki,