| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8032058 | Surface and Coatings Technology | 2017 | 9 Pages |
Abstract
âºOrganic-inorganic hybrid SiOxCyNz films produced by an APPJ with TMDSO precursor. âºFlexible, transparent and hard PC/SiOxCyNz formed using air plasma jet. âºHigher chemical bonds Siâ(O)4 and (R)1âSiâ(O)3 offer higher surface hardness. âºHigher deposition rate results in lower proportion of grain boundary. âºLower proportion of grain boundary provides smoother surface.
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Authors
Yung-Sen Lin, Mao-Syuan Weng, Tsair-Wang Chung, Charming Huang,