Article ID Journal Published Year Pages File Type
8032094 Surface and Coatings Technology 2011 4 Pages PDF
Abstract
►Si3N4 does not react with C2H2 in the sputtering condition. ►Transitional metal carbide (VC) could force amorphous materials (Si3N4) crystallized due to “template effect”. ►The carbide-based multilayer can also exhibit coherent growth and get superhardness effect.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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