Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8032094 | Surface and Coatings Technology | 2011 | 4 Pages |
Abstract
âºSi3N4 does not react with C2H2 in the sputtering condition. âºTransitional metal carbide (VC) could force amorphous materials (Si3N4) crystallized due to “template effect”. âºThe carbide-based multilayer can also exhibit coherent growth and get superhardness effect.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Guanqun Li, Yuge Li, Geyang Li,