| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8032185 | Surface and Coatings Technology | 2011 | 5 Pages |
Abstract
⺠SiC nano-crystals embedded in amorphous SiO2 can be prepared using TEOS and C2H2. ⺠Laser irradiation enhances surface chemical reaction and film growth in CVD process. ⺠Dome-like deposits form at a low total pressure and high temperature conditions.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Shu Yu, Akihiko Ito, Rong Tu, Takashi Goto,