Article ID Journal Published Year Pages File Type
8032195 Surface and Coatings Technology 2011 7 Pages PDF
Abstract
►High Me+ bombardment be achieved during HIPIMS etching leads to high adhesion. ►HIPIMS for TiAlCN deposition has shown more metal/gas ion ratio (1:7) than UBMS (1:32). ►High metal ion bombardment leads to a very dense coating (no inter-columnar voids). ►The HIPIMS deposited TiAlCN/VCN coating shows high oxidation resistance (≅ 800 °C).
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Physical Sciences and Engineering Materials Science Nanotechnology
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