Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8032592 | Thin Solid Films | 2018 | 6 Pages |
Abstract
The present study focused on nitrogen doped Al2O3 thin films using atomic layer deposition, varying the deposition temperature from 55 to 170â¯Â°C. Al2O3 thin film growth rate and electrical properties were mostly dependent on deposition temperature. Nitrogen concentration decreased from 2.7 to 2.4% with increasing deposition temperature. X-ray photoelectron spectroscopic analysis confirmed that nitrogen doping in Al2O3 decreased formation of oxygen related defects, including non-lattice oxygen. Surface morphology analyses also showed that N-doping reduced Al2O3 film surface roughness. Reduced oxygen related defects significantly reduced leakage current by 1000 times when comparing with as-deposited films. Minimum leakage current (5â¯Ãâ¯10â10â¯A/cm2) was observed for N-doped Al2O3 film deposited at 170â¯Â°C and post-annealed at 400â¯Â°C, including a decrease by 10 times through N-doping.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Minjae Kim, Kyung-Mun Kang, Yue Wang, Hyung-Ho Park,