Fluorine doped titanium dioxide films manufactured with the help of plasma enhanced chemical vapor deposition technique

GIXRD analysis of the coatings doped with fluorine shows their amorphous structure. Apart from TiO2 bonding, FTIR and XPS analyses of the films reveal a presence of TiF and OF bonds. Surface morphology studies indicate an increasing number of surface defects along with growing fluorine content. The coatings exhibit promising optical properties with some of them showing a super-hydrophilic effect as well. On the other hand, the bactericidal effect of fluorine doped TiO2 coatings is weaker than that of plain TiO2.