Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8033819 | Thin Solid Films | 2015 | 5 Pages |
Abstract
We present a method to deposit films with a range of doping concentrations/dilute alloys, from a single target in pulsed laser deposition (PLD). Cr-doped ZnS films were deposited by ablating a target consisting Cr particles (diameter 20-100 μm) embedded in a ZnS:Cr matrix. The Cr content in the film was varied in the range 2.0-5.0 at.% simply by varying the laser fluence, or by varying the number of pre-ablation pulses. Such a doping/composition range is normally not achieved using a single target in PLD. Details of the target ablation study, which is needed prior to the deposition, are also presented.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Mohammadreza Nematollahi, Xiaodong Yang, Ursula J. Gibson, Turid W. Reenaas,