Article ID Journal Published Year Pages File Type
8034223 Thin Solid Films 2015 5 Pages PDF
Abstract
In this study, nitrogen-doped WOx thin films are investigated for the improvement of resistive switching (RS) properties. Compared to WOx thin films, nitrogen-doped WOx thin films exhibit a higher on/off current ratio (a separation of ~ 2 orders of magnitude), better endurance (> 100 cycles), narrower current dispersion, and longer retention characteristics (> 104 s). Electrical measurements, X-ray diffraction, and X-ray photoelectron spectroscopy demonstrate that nitrogen in WOx:N thin films forms WN nanoclusters and Wx (O, N) phases, which are beneficial to improve the RS properties in WOx thin films; WN nanoclusters can locally enhance the electric field to form stable conductive filament while Wx (O, N) phases can suppress random migrations of oxygen ions (O2 −), leading to stable RS characteristics. Our findings suggest that nitrogen doping method can lead further optimization of the RS characteristics in WOx thin films.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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