| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8034525 | Thin Solid Films | 2015 | 102 Pages |
Abstract
In the last section of this review, we describe how hollow cathodes have and can be used to deposit thin films and nanostructured coatings. We provide an extensive and approximately chronological listing of how hollow cathodes have been successfully used to deposit materials, mainly by sputtering and plasma enhanced chemical vapour deposition based techniques.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Stephen Muhl, Argelia Pérez,