Friction properties of amorphous carbon ultrathin films deposited by filtered cathodic vacuum arc and radio-frequency sputtering

The friction properties of ultrathin films of amorphous carbon (a-C) deposited on Si(100) substrates by filtered cathodic vacuum arc and radio-frequency sputtering were investigated by surface force microscopy. Deposition parameters yielding a-C films with high sp3 content were used to deposit films of thickness between 5 and 35 nm. The coefficient of friction of both types of a-C films was measured with a 1-μm-radius conical diamond tip and normal loads in the range of 20-640 μN. The results show a strong dependence of the friction properties on the surface roughness, thickness, and structure of the a-C films, which are influenced by the intricacies of the deposition method. The dependence of the coefficient of friction on normal load and the dominance of adhesion and plowing friction mechanisms are interpreted in terms of the through-thickness variation of carbon atom hybridization of the a-C films.