Kinetic considerations of gas-phase adsorption of growth species on the c-BN(100) surface

It was shown that BFx and NHx (x = 0, 1, 2, 3) adsorption occurs without any energy barrier for all x. Adsorption of growth species on a monoradical surface site on the F-covered B-terminated c-BN(100)-(2 × 1) surface and the H-covered N-terminated c-BN(100)-(1 × 1) surface is therefore expected to be a highly facile process. However, decomposition of the incoming BF3 and NH3 growth species is needed for CVD growth of c-BN to occur.