Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8035098 | Thin Solid Films | 2014 | 4 Pages |
Abstract
Characteristics of B-doped Si epitaxial growth on Si(100) by using electron-cyclotron-resonance Ar plasma enhanced chemical vapor deposition without substrate heating in a SiH4-B2H6-H2-Ar gas mixture were investigated. B concentration in the deposited films increases with decreasing microwave power for plasma generation. At the microwave power of 125 W, the B concentration increases up to 5 Ã 1021 cmâ 3. Deposition rate of the B-doped Si tends to be enhanced at the higher B2H6 partial pressure. Resistivity of the B-doped Si film tends to increase with decreasing the microwave power. Referring Irvin curve, in the case of 200 W, the carrier concentration is estimated to be at least about 1017 cmâ 3 at the B concentration of 1021 cmâ 3. After heat treatment in N2 atmosphere at 200 °C and 300 °C for 2 h, the resistivity drastically decreases to the value which corresponds to carrier concentration of around 1019 cmâ 3. From Fourier transform infrared spectroscopy measurement, it is found that hydrogen incorporated in the as-deposited film desorbed by the heat treatment.
Keywords
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yusuke Abe, Masao Sakuraba, Junichi Murota,