Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8035119 | Thin Solid Films | 2014 | 4 Pages |
Abstract
Phosphorus doping by P implantation and thermal annealing of the BaSi2 epitaxial film grown on the Si(111) substrate has been studied. Raman spectroscopy results show that the structural damage due to P implantation can be almost removed by annealing within 30 and 1 s at 500 and 700 °C, respectively. The depth profile of P is investigated by secondary ion mass spectroscopy, which reveals considerably slower diffusion kinetics of P at 500 °C than 700 °C. The activation energy of the diffusion is roughly estimated to be 2 eV from the temperature dependence. The Hall measurement of the P-doped films clarifies that the P impurity is an electron donor in BaSi2. The average electron density up to the order of 1018 cmâ 3 is observed.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Kosuke O. Hara, Yusuke Hoshi, Noritaka Usami, Yasuhiro Shiraki, Kotaro Nakamura, Kaoru Toko, Takashi Suemasu,