Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8035149 | Thin Solid Films | 2014 | 5 Pages |
Abstract
We have investigated the substrate orientation dependence of the crystallinity and strain relaxation behavior of Ge and Ge1 â xSnx layers epitaxially grown on Ge(001), (110), and (111) substrates. The strain relaxation in Ge1 â xSnx layers on Ge(110) and (111) occurs from a strain value smaller than that on Ge(001). We obtained the critical strain energy of a Ge1 â xSnx layer regardless of Ge substrate orientation. As a result, we achieved the epitaxial growth of pseudomorphic Ge1 â xSnx layers with high substitutional Sn contents of 8.5% and 6.7% on Ge(110) and (111) substrates, respectively.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Takanori Asano, Shohei Kidowaki, Masashi Kurosawa, Noriyuki Taoka, Osamu Nakatsuka, Shigeaki Zaima,