Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8035787 | Thin Solid Films | 2013 | 6 Pages |
Abstract
⺠Growth of InGaN epilayers by molecular beam epitaxy ⺠InGaN epilayers with In content up to 30 at.% without secondary phase formation. ⺠Controlled In content to the targeted content from the experimental set-up. ⺠Nitridation process of sapphire substrate to formed epitaxial AlN layer. ⺠Growth mode and structural characterization of InGaN layers
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Eun-Jung Shin, Se-Hwan Lim, Myoungho Jeong, Dong Seok Lim, Seok Kyu Han, Hyo Sung Lee, Soon-Ku Hong, Jeong Yong Lee, Takafumi Yao,