Article ID Journal Published Year Pages File Type
8035787 Thin Solid Films 2013 6 Pages PDF
Abstract
► Growth of InGaN epilayers by molecular beam epitaxy ► InGaN epilayers with In content up to 30 at.% without secondary phase formation. ► Controlled In content to the targeted content from the experimental set-up. ► Nitridation process of sapphire substrate to formed epitaxial AlN layer. ► Growth mode and structural characterization of InGaN layers
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Physical Sciences and Engineering Materials Science Nanotechnology
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