Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8035830 | Thin Solid Films | 2013 | 4 Pages |
Abstract
We investigated the electrical and the optical properties of polar and nonpolar ZnO films grown on sapphire substrates with different crystallographic planes. High resolution X-ray results revealed that polar c-plane (0001), nonpolar m-plane (10-10) and a-plane (11-20) ZnO thin films were grown on c-plane, m- and r-sapphire substrates by atomic layer deposition, respectively. Compared with the c-plane ZnO film, nonpolar m-plane and a-plane ZnO films showed smaller surface roughness and anisotropic surface structures. Regardless of ZnO crystal planes, room temperature photoluminescence spectra represented two emissions which consisted of the near bandedge (~Â 380Â nm) and the deep level emission (~Â 500Â nm). The a-plane ZnO films represented better optical and electrical properties than c-plane ZnO, while m-plane ZnO films exhibited poorer optical and electrical properties than c-plane ZnO.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Ki-Wook Kim, Hyo-Soo Son, Nak-Jung Choi, Jihoon Kim, Sung-Nam Lee,