| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8035967 | Thin Solid Films | 2013 | 7 Pages |
Abstract
The variations of the deposition rate are related to a change from a surface determined decomposition of TDMAT to a gas phase decomposition route above 250 °C. At the same temperature, the microstructure of the TiO2 layers changes from amorphous to predominately crystalline, where both anatase and rutile are present.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Barbara Abendroth, Theresa Moebus, Solveig Rentrop, Ralph Strohmeyer, Mykola Vinnichenko, Tobias Weling, Hartmut Stöcker, Dirk C. Meyer,