Article ID Journal Published Year Pages File Type
8036162 Thin Solid Films 2013 4 Pages PDF
Abstract
► Surface texturing of multicrystalline silicon wafers ► Improvement of the trapping of incident light ► Random reactive ion etching texturing method using SF6/O2 plasma chemistry ► Low cost and high efficiency in conventional industrial production line
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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