Article ID Journal Published Year Pages File Type
8036780 Thin Solid Films 2013 6 Pages PDF
Abstract
The chemical composition and microstructure of Ni-P films affect the electrical properties of micro heaters. Energy-dispersive X-ray spectroscopy identified the Ni-P composition and confirmed its insignificant level of oxidation. The high-temperature X-ray diffraction indicated that the as-deposited film was crystalline Ni, which later transformed into Ni3P at higher temperature. The resistivity of Ni-P films was tailored between 10− 5 and 10− 7 Ω m via a post-deposition annealing, which also obtained a stable temperature coefficient of resistance. Consequently, the performance of micro heaters could be designed with a high degree of flexibility.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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