Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8036780 | Thin Solid Films | 2013 | 6 Pages |
Abstract
The chemical composition and microstructure of Ni-P films affect the electrical properties of micro heaters. Energy-dispersive X-ray spectroscopy identified the Ni-P composition and confirmed its insignificant level of oxidation. The high-temperature X-ray diffraction indicated that the as-deposited film was crystalline Ni, which later transformed into Ni3P at higher temperature. The resistivity of Ni-P films was tailored between 10â 5 and 10â 7 Ω m via a post-deposition annealing, which also obtained a stable temperature coefficient of resistance. Consequently, the performance of micro heaters could be designed with a high degree of flexibility.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Bernard Haochih Liu, Fang-Yi Liao, Jian-Hong Chen,