Process monitoring of texture-etched high-rate ZnO:Al front contacts for silicon thin-film solar cells

Article ID	Journal	Published Year	Pages	File Type
8037025	Thin Solid Films	2013	7 Pages	PDF

Abstract

âº Deposition conditions were altered to simulate process drift in system. âº Texture of etched ZnO:Al shows trends depending on deposition conditions. âº Trends can be identified using angular resolved scattering measurements. âº Significance of detected trends to solar cell performance was confirmed. âº Use of angular intensity distribution parameters for texture optimization was suggested.

Keywords

ZnO:Al Texture Optimization Light trapping Sputter deposition Solar cell Thin-film Process monitoring

Related Topics

Physical Sciences and Engineering Materials Science Nanotechnology

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Process monitoring of texture-etched high-rate ZnO:Al front contacts for silicon thin-film solar cells

Authors

Gabrielle Jost, Tsvetelina Merdzhanova, Thomas Zimmermann, Jürgen Hüpkes,