Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037051 | Thin Solid Films | 2013 | 5 Pages |
Abstract
⺠A multilayer gas barrier was made by hot wire chemical vapor deposition at 100 °C. ⺠A water vapor transmission rate of 5 Ã 10â 6 g/m2/day was found. ⺠Found at 60 °C and a relative humidity of 90%, this is low enough for any device. ⺠These layers can be deposited directly onto organic of polymeric active devices. ⺠The adhesion between the organic and inorganic layers, and robustness is high.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
D.A. Spee, M.R. Schipper, C.H.M. van der Werf, J.K. Rath, R.E.I. Schropp,