Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037070 | Thin Solid Films | 2013 | 8 Pages |
Abstract
⺠Cylindrical magnetrons can be well used in a sputter up configuration. ⺠Cylindrical magnetrons were used to create transparent oxide layers. ⺠Metallic mode reactive sputtering yields bulk-like refractive indexes. ⺠Ta2O5 and SiO2 growth is driven by different parameters.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Daniel Rademacher, Tobias Zickenrott, Michael Vergöhl,