Article ID Journal Published Year Pages File Type
8037070 Thin Solid Films 2013 8 Pages PDF
Abstract
► Cylindrical magnetrons can be well used in a sputter up configuration. ► Cylindrical magnetrons were used to create transparent oxide layers. ► Metallic mode reactive sputtering yields bulk-like refractive indexes. ► Ta2O5 and SiO2 growth is driven by different parameters.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration
Authors
, , ,