| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037090 | Thin Solid Films | 2013 | 10 Pages |
Abstract
⺠Solid and pressed powder targets were used to determine sputter yields. ⺠The experimental trends are reproduced by a Monte Carlo code. ⺠The nascent angular distribution of sputtered particles is calculated. ⺠A significant influence of the target morphology on the deposition flux is reported.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
F. Boydens, W.P. Leroy, R. Persoons, D. Depla,