Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037139 | Thin Solid Films | 2013 | 6 Pages |
Abstract
⺠CrN/AlN, CrAlN/AlN, CrAlYN/AlN multilayer coatings ⺠Cr-based nitride layers (100 nm) and either 3 nm or 10 nm thin AlN layers ⺠Cubic AlN for 3 nm thin layers and wurtzite structure for 10 nm thin layers ⺠Increased hardness for the multilayer coatings composed of 10 nm thin AlN layers ⺠Hardness increases to 36 GPa for CrAlYN/AlN coatings due to annealing at 900 °C.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
M. Schlögl, J. Paulitsch, J. Keckes, P.H. Mayrhofer,