| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037140 | Thin Solid Films | 2013 | 6 Pages |
Abstract
⺠Photosensitive TiO2/ormosil hybrid film is prepared by a sol-gel process. ⺠Optical properties of the films change a little with UV exposure time. ⺠Photo-chemical property of the film changes a lot with UV exposure time. ⺠The imprint force and time, and the UV exposure time affect the imprint fidelity. ⺠A fidelity value of 99.7% is obtained under an optimized condition.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Xuehua Zhang, Wenxiu Que, Jing Chen, Tianxi Gao, Jiaxing Hu, Weiguo Liu,