| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037146 | Thin Solid Films | 2013 | 8 Pages |
Abstract
⺠In implanted GaN is studied by Raman spectroscopy, RBS and nano-indentation. ⺠Phonon coherence length decreases in accordance to hardness and elastic modulus. ⺠Elastoplastic behavior is observed at low and plastic at high fluences. ⺠Annealing is more effective at fluences that do not cause complete amorphization. ⺠At high fluences annealing results in redistribution of atomic species.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
K. Filintoglou, P. Kavouras, M. Katsikini, J. Arvanitidis, D. Christofilos, S. Ves, E. Wendler, W. Wesch,