Article ID Journal Published Year Pages File Type
8037151 Thin Solid Films 2013 8 Pages PDF
Abstract
► Distinguishing between chemical and purely defect-related implantation effects ► Layer geometry and microstructure of the deposited and ion-irradiated layers ► Variation of the electric and optical resistivity as function of ion fluence and type ► Opto-electric properties in terms of plasma energy and electron relaxation time
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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