Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037152 | Thin Solid Films | 2013 | 6 Pages |
Abstract
⺠Room temperature deposition of transparent and conductive ZnO:Si (SZO) thin films ⺠Low resistivity of 3.3 Ã 10â 4 Ω cm for 1.5 at.% of Si in SZO thin films ⺠Comparable electrical performances as the state of the art In2O3:Sn
Related Topics
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Materials Science
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Authors
J. Clatot, M. Nistor, A. Rougier,