Article ID Journal Published Year Pages File Type
8037154 Thin Solid Films 2013 9 Pages PDF
Abstract
► Thick silica hybrid films were micromachined with diamond cutting tools. ► The nanoindentation hardness increased with the heat treatment temperature. ► The role of sodium hydroxide in base catalyzed silica sols was studied. ► Formation of carbonates, carboxylates and disordered carbon was observed.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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