Article ID Journal Published Year Pages File Type
8037169 Thin Solid Films 2013 4 Pages PDF
Abstract
► The low residual stress of thick B4C film is achieved by inserting the Cr layers. ► The residual stresses of B4C/Cr multilayer films depend on their interface stress. ► The interface stress is dependent on the B4C layer thickness in multilayer. ► The interface stress is independent on the Cr layer thickness in multilayer.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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