Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
8037169 | Thin Solid Films | 2013 | 4 Pages |
Abstract
⺠The low residual stress of thick B4C film is achieved by inserting the Cr layers. ⺠The residual stresses of B4C/Cr multilayer films depend on their interface stress. ⺠The interface stress is dependent on the B4C layer thickness in multilayer. ⺠The interface stress is independent on the Cr layer thickness in multilayer.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Zhong Zhang, Yu Liang, Wenbin Li, Zhanshan Wang, Hong Chen,