| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037171 | Thin Solid Films | 2013 | 8 Pages |
Abstract
⺠Reports the synthesis of Nb/Si multilayers (48/27 nm) by laser ablation. ⺠Reports amorphous Si layer that contains ~ 27 at.% Nb. ⺠Phase evaluation at 600 °C indicate formation of hexagonal Nb5Si3 phase. ⺠Phase evolution is different from that reported for sputter deposition.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
S. Kashyap, K. Chattopadhyay,