| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037173 | Thin Solid Films | 2013 | 4 Pages |
Abstract
⺠The ratio of CC bonds and CHx bonds of amorphous carbon layer (ACL) is analyzed. ⺠The obtained ratio is compared with the etch-durability of ACL. ⺠A linear relationship is observed between the bond ratio and etch-durability of ACL. ⺠The obtained relationship is found to be universal in various conditions. ⺠A non-destructive method to predict the etch-durability is proposed.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
J.H. Kwon, S.Y.L. Park, K.C. Seo, W.J. Ban, G.O. Park, D.D. Lee,