| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037212 | Thin Solid Films | 2013 | 7 Pages |
Abstract
⺠N and O doping were used to enhance the mechanical properties of a-SiC:H films. ⺠N and O doping significantly improved the elastic and fracture properties. ⺠N doping made the films insensitive to moisture-assisted cracking. ⺠Changes in the mechanical properties were related to the molecular structure.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yusuke Matsuda, Sean W. King, Reinhold H. Dauskardt,