| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 8037234 | Thin Solid Films | 2013 | 5 Pages |
Abstract
⺠Amorphous InGaZnO4 (a-IGZO) films were prepared with different sputtering modes. ⺠Electrical and optical properties of the different films were compared. ⺠Fermi level (â³EF) shift in a-IGZO films were tested by X-ray photoelectron spectroscopy. ⺠The relation of â³EF with the properties of a-IGZO films were discussed. ⺠Work function was tested by ultraviolet photoelectron spectroscopy.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Jianke Yao, Li Gong, Lei Xie, Shengdong Zhang,