Article ID Journal Published Year Pages File Type
8037246 Thin Solid Films 2013 7 Pages PDF
Abstract
► Disordered Si epilayers were grown by molecular beam epitaxy. ► Growth has been carried out at temperatures T = 98 °C-514 °C. ► A correlation between defect density and disorder in the films has been found. ► Lack of medium range order and stress cause the formation of defects at low T. ► At high T, defects are associated to grain boundaries and oriented stacking faults.
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Physical Sciences and Engineering Materials Science Nanotechnology
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